金屬代替柵工藝流程

金屬代替柵工藝流程

?

?

????

英文回答：

?

?

????Metal?replacement?gate?(MRG)?technology?is?an?advanced?

process?used?in?semiconductor?manufacturing?to?replace?the?

traditional?polysilicon?gate?with?a?metal?gate.?This?

technology?offers?several?advantages?over?the?conventional?

polysilicon?gate,?including?improved?performance?and?

reduced?power?consumption.?

?

????The?process?flow?of?metal?replacement?gate?technology?

involves?several?steps.?First,?a?high-k?dielectric?layer?is?

deposited?on?the?silicon?substrate.?This?dielectric?layer?

acts?as?an?insulator?and?helps?to?improve?the?gate?

capacitance.?Next,?a?metal?layer,?typically?composed?of?a?

refractory?metal?such?as?tungsten?or?titanium,?is?deposited?

on?top?of?the?dielectric?layer.?This?metal?layer?serves?as?

the?gate?electrode.?

?

????After?the?metal?layer?deposition,?a?patterning?step?is?